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Spacer-Defined Intrinsic Multiple Patterning





Laney, SK; Li, T; Michalska, M; Ramirez, F; Portnoi, M; Oh, J; Tiwari, MK; ... Papakonstantinou, I; + view all Laney, SK; Li, T; Michalska, M; Ramirez, F; Portnoi, M; Oh, J; Tiwari, MK; Thayne, IG; Parkin, IP; Papakonstantinou, I; - view fewer (2020) Spacer-Defined Intrinsic Multiple Patterning. ACS Nano 10.1021/acsnano.0c05497 . (In press).

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